摘要
采用磁控溅射技术在Ti6Al4V合金表面制备了具有抗菌性能的Ag涂层。通过扫描电子显微镜（SEM），X射线衍射仪（XRD），表面粗糙度仪、划痕试验仪，显微硬度仪，抗菌实验、生物相容性实验测试分析后，评估了薄膜的微观结构、厚度、显微硬度、涂层结合力、抑菌性、生物相容性等，其结果表明：Ag粒子能均匀地沉积在钛合金基体表面，粒径大小均一，尺寸范围在0.1-0.5um，涂层表面光洁，粗糙度Ra为0.032±0.005。涂层显微硬度为255±4Hv，微观下可观察到涂层和基体结合良好。当施加力进行划痕测试时，45-50N时涂层开始出现裂痕，随着划痕仪施加力的增加，涂层开始大面积脱落。在抗菌实验中，Ag涂层在48小时，抑菌范围在0.4cm。该实验结果表明：钛合金基Ag涂层通过磁控溅射技术制备，可应用于加工正畸牙套，同时能避免牙菌斑的产生。
关键词： 磁控溅射；银涂层；性能；Ti6Al4V
Abstract
Ag coating with antibacterial properties was prepared on Ti6Al4V alloy by magnetron sputtering technique. In the characterization process, the microstructure, thickness, microhardness, coating bonding force, surface roughness and antibacterial properties of the film were evaluated by SEM, XRD, surface roughness meter, scratch tester, microhardness tester, antibacteria test. The results showed that the Ag particles can be uniformly deposited on the surface of the titanium alloy matrix, and particle size was in the range of 0.1-0.5um, surface roughness Ra was 0.032±0.005, microhardness value was 255±4Hv. The coating was bonded well with the substrate. Under the scratch force, in the range of 45-50N, the layer begins to crack. As the force applied increases, coating began to peel off. In the antibacterial test, the size of the inhibition zone was 0.4cm after 48 hours. These results indicated that titanium alloy based Ag coating was prepared by magnetron sputtering technology, which can be used in the processing of orthodontic braces, and also can avoid the dental plaque.
Key words： Magnetron Sputtering; Silver Coating; Properties; Ti6Al4V
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